TXFJ-110 High vacuum turbo molecular pump station with rotary vane pump

Product Description: 

TXFJ-110 series molecular pump unit is a clean ultra-high vacuum acquisition equipment assembled in the frame by F-100/110 series turbomolecular pump, front mechanical pump, resistance gauge/ionization gauge composite vacuum gauge, partition bleed valve, front pipeline, molecular pump power supply, control power supply, etc. Easy installation, simple operation, easy to connect, reliable performance, can match various models of instrument tube furnace for surface analysis, semiconductor equipment, plasma technology, electric vacuum device manufacturing and vacuum technology fields.

Technical performance parameters of molecular pump unit:

Pumping speed curve of molecular pump unit：