Turbo pump

TXFJ-110 High vacuum turbo molecular pump station with rotary vane pump

TXFJ-110 High vacuum turbo molecular pump station with rotary vane pump

Product use: Create a 10-4Pa high vacuum environment for the tube furnace, with fast pumping speed and simple operation

Item NO :
TXFJ-110
Pumping speed :
110 L/s

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Product Details

Product Description:

TXFJ-110 series molecular pump unit is a clean ultra-high vacuum acquisition equipment assembled in the frame by F-100/110 series turbomolecular pump, front mechanical pump, resistance gauge/ionization gauge composite vacuum gauge, partition bleed valve, front pipeline, molecular pump power supply, control power supply, etc. Easy installation, simple operation, easy to connect, reliable performance, can match various models of instrument tube furnace for surface analysis, semiconductor equipment, plasma technology, electric vacuum device manufacturing and vacuum technology fields.

Technical performance parameters of molecular pump unit:

Model No.	TXFJ-110	TXFJ-150	TXFJ-300	TXFJ-600S	TXFJ-600D
Pumping Speed	110 L/S	140 L/S	300 L/S	600 L/S	600 L/S
Backing pump speed	4 L/S	4 L/S	4 L/S	16 L/S	8 L/S
Ultimate Pressure	≤8.0*10^-5Pa	≤8.0*10^-5Pa	≤8.0*10^-5Pa	≤8.0*10^-5Pa	≤8.0*10^-5Pa
Use Pressure	≤5.0*10^-4 Pa	≤5.0*10^-4 Pa	≤5.0*10^-4 Pa	≤5.0*10^-4 Pa	≤5.0*10^-4 Pa
Inlet Port	KF25	KF25	KF25	KF40*2	KF40*2
Startup time	˂10min	˂10min	˂10min	˂10min	˂10min
Total Power	1.2 KW	1.2 KW	1.2 KW	2.5 KW	2.0 KW
Power supply	220V/50HZ	380V/50HZ	220V/50HZ	380V/50HZ	220V/50HZ
Cooling	Air	Air	Air	Air	Air
Weight	60kg	60kg	75kg	195 kg	160 kg
*Dimension(WDH) mm*	500×510×840	500×510×840	500×510×840	7705301050	7705301030

Pumping speed curve of molecular pump unit：

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