Turbo molecular pump water-cooled composite molecular pump

Txfb-1200 composite molecular pump

High vacuum flange (mm) 200 CF 200 ISO-K

Front pipe flange (mm) 40 KF

Extraction speed (L/S)(to air) 1200

Compression ratio

N

2 > 10

9 H

2 >1X10

4 Ultimate pressure (Pa) is less than 8×10

- 8 < 5 x 10

-7 Motor RPM 27000

The vibration value of 0.1 microns or less

Startup time (min) 5

Downtime (min) 7

Recommended front stage pump (L/S) 8-15

Cooling mode Water cooling

The cooling water temperature of the water-cooled pump (℃) ≤25

Water cooling water flow (L/min) 2

Pump body baking temperature (℃) <120

Heater power (W) <300

Heater input voltage (V) AC220

Amperage vertical ±5°

Pump weight (kg) ≈29