Turbo molecular pump Grease lubricated molecular pump

Txfb-2000z Grease lubricated molecular pump

High vacuum flange 250 CF 250 ISO-K

Front pipe flange 50 KF

Protective gas inflatable flange (anti-corrosion pump) 16 KF

Extraction speed (L/S) 2000

Compression ratio

N2 >109

H2 >1X104

Ultimate pressure (Pa) <8×10-8 <5×10-7

Motor revolution (N/min) 24000

Lubricate ceramic bearings with bearing grease

The vibration value of 0.1 microns or less

Startup time (min) <5

Recommended use of the front stage pump 8-15 L/S

Cooling mode Water cooling (air cooling)

Water cooling water temperature ≤20℃

Water cooling water flow (L/min) 1

Installation direction arbitrary Angle

Pump weight (kg) ≈30