helium mass spectrometer leak detector

Dual-Valve Integrated Mobile High-Speed Helium Mass Spectrometer Leak Detector TX400

The minimum leak rate is 5.0E-13 Pa.m³/s, equipped with a 2.5 L/s molecular pump and an 8 L/s oil-free scroll vacuum pump or a 6 L/s oil-type rotary vane vacuum pump, and provides a variety of backing pump options ; it has high sensitivity and fast response, supports wireless remote control operation , and is suitable for cart high-pumping speed vacuum leak detection helium mass spectrometer leak detector for He4, He3 and H2 multi-gas detection .

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Product Details

Overview
TX 400 is a highly efficient helium mass spectrometer leak detector designed for vacuum industry and semiconductor manufacturing. It is suitable for various pressure vessels, pipeline devices and vacuum systems with high cleanliness requirements.

Feature

· High sensitivity : minimum detectable leak rate is 5.0E-13 Pa.m³/s (vacuum).

· Fast response : response time is less than 0.5 seconds.

· Double valve body design : effectively shorten the pumping time.

· Multiple detection gases : support He4, He3, H2.

Technical Parameters:

Minimum detectable leak rate He4	5.0E-13Pa.m3/s (vacuum)		≤ 5.0E-9Pa.m3/s (inhalation)
Response time	≤ 0.5 sec
Start Time	≤3 minutes
Molecular pump pumping speed He	2.5 L/s (Hicube 80)
Backing vacuum pump pumping speed	Oil-free scroll vacuum pump	8L/s;(Iwata 500C/ A gilent TS600);30m³/h
		4L/s;(Iwata 250C/ A gilent TS300);15m³/h
	Oil type rotary vane vacuum pump	6L/s;( TX2 24 etc.);24 m³/h
Detectable gas	Helium 4/Helium 3/Hydrogen
Units of measurement	Pa.m3/s, mbar.l/s, Torr.l/s, PPm
source of ion	Yttrium oxide iridium wire (two pieces)
Mass spectrometry room	180° Inhomogeneous Magnetic Deflection Mass Spectrometry
Calibrated leak	Channel type -7mbar.l/s (built-in leak)
Communication Interface	RS232/Input and Output
language	Chinese/English/Russian
working environment	Temperature 5~40℃ Humidity ≤80%
Power supply	AC220V±10
weight	About 115 Kg
size	974mm550mm1026mm

Innovation and functionality

· Equipped with a wireless remote control, it can achieve barrier-free operation over 100 meters.

· Support remote control via TX series APP.

Device Configuration

· Molecular pump speed: 2.5 L/s

· Backing vacuum pump: oil-free scroll vacuum pump (8 L/s) or oil-type rotary vane vacuum pump (6 L/s)

Application Scenario

· Semiconductor and electronics manufacturing : Testing the airtightness of chips and electronic components.

· Aerospace : Used for vacuum leak detection in spacecraft and aviation equipment.

· Pharmaceuticals and Chemicals : Ensure that the production environment of pharmaceuticals and chemicals is leak-free.

· Automobile manufacturing : Testing the air tightness of automobile parts, such as airbags and brake systems.

· Analytical instruments: electron microscope, leakage detection, mass spectrometry, surface analysis, etc.

· Research and development: space simulation, cryogenic research, nanotechnology, coating systems, etc.

· Semiconductor: load lock, transfer, metrology, lithography, physical vapor deposition (PVD), plasma etching, implantation source, chemical vapor deposition (CVD), flat panel display, LED, etc.

· Industry: industrial leakage detection, electron beam welding, lamp tube manufacturing, glass coating, brake pipe and air conditioning, refrigeration system manufacturing, heat treatment, power, vacuum furnace , vacuum coating, battery manufacturing , etc.

· High energy physics: beam, accelerator, fusion, laser evacuation, etc.

Additional features and accessories

· Optional accessories such as wireless remote control, Bluetooth touch handle, etc. can enhance the convenience of operation.

Helium-Leak-DetectorsTX400H Dimension