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Multi-Station Vacuum Storage Cabinet

Multi-Station Vacuum Storage Cabinet
Multi-Station Vacuum Storage Cabinet
Multi-Station Vacuum Storage Cabinet
Multi-Station Vacuum Storage Cabinet

Multi-Station Vacuum Storage Cabinet

This equipment adopts independent control mode for each station, which can realize functions such as independent charging and deflating, and independent setting of nitrogen cleaning and vacuum degree. It is widely used in Temporarily store products during the production process of electronic devices, optoelectronic devices, semiconductor chips and other devices to prevent oxidation

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Parameter

Specification

UItimate vacuum

5x10~⁵Pa

Operating vacuum

≤8x10-³Pa

System leakage rate

≤2x10 Pa·m/s

Cleanliness

Semiconductor grade

Workstation quantity

11  (customizable)
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