The rotary vane vacuum pump is equipped with a vacuum electromagnetic valve and a dust filter in the pump port. The electromagnetic valve can prevent the vacuum pump oil in the pump cavity from flowing back into the suction pipe when the vacuum pump is suddenly stopped or powered off. The dust filter can effectively filter particulate matter with a particle size larger than 5μm without affecting the vacuuming effect.
Rotary vane vacuum pump Can be started and stopped manually with the start / stop button. When the rotary vane pump is started and the equipment pressure is <30 Pa, the diffusion pump can be started arbitrarily by the start button. The diffusion pump can be stopped by the stop button.
The diffusion pump and cold trap are water-cooled, and the circulating cooling water must be continuously fed into the equipment during normal operation. The equipment is equipped with a G 3/8 total water inlet and outlet.