STP-iXA4507 Turbomolecular Pump with Large Exhaust Capacity Launched Worldwide

How to solve the problem of turbomolecular pumps in semiconductor cavities

To meet the demand for high exhaust molecular pumps in the development of advanced semiconductor processes, Edwards Vacuum, a leading global provider of vacuum equipment and exhaust treatment solutions, has launched the STP-iXA4507 series magnetic levitation molecular pumps with optimized gas flow and temperature management functions, which can effectively cope with various severe process challenges.

This series of molecular pumps has excellent pumping speed and exhaust capacity, especially suitable for high flow processes such as semiconductor etching, FPD etching, PVD, etc.

This series of molecular pumps adopts magnetic levitation technology and does not rely on mechanical bearings for operation, reducing operation and maintenance costs.

Integrated Turbomolecular Pump Solution

The fully integrated controller and power supply eliminate the need for cables and separate controller racks, resulting in a low-cost, compact design, fast and convenient installation, and small footprint.

Better performance

Compared with similar products, the maximum continuous flow rate increases by more than 60%.

The pumping speed is increased by 2% -8%, effectively shortening the cavity evacuation time.

What is the process of temperature management system for turbo  pumps

The Temperature Management System (TMS) device can be used to generate by-product processes.

The B * coating is suitable for the high exhaust volume process of TMS.

How to efficiently and energy-efficient turbomolecular pumps

The molecular pump can operate efficiently under cooling water conditions up to 35 ° C.

Optimized structural design, with power consumption only equivalent to 65-75% of similar products.

communication

• I/O Remote, RS232, RS485, STP-Link standard ports.

EtherCAT can be used as an optional solution.

Optional function: rotor temperature sensor

The rotor temperature alarm can reduce the risk of pump breakage and improve the machine operation time.