Turbo pump Grease lubricated molecular pump Txfb-650z grease lubricated compound molecular pump High vacuum flange (inlet flange) 150 CF 160 ISO-K Front pipe flange 40 KF Protective gas inflatable flange (anti-corrosion pump) 16 KF Extraction speed (L/S) 650 Compression ratio N 2 > 10 9 H 2 >1X10 4 ultimate pressure (Pa) <2×10 7 < 5 x 10 -7 Motor revolution (N/min) 24000 Lubricate ceramic bearings with bearing grease The vibration value of 0.1 microns or less Startup time (min) <5 Recommended use of the front stage pump 4-8L/S Cooling mode Water cooling Installation direction arbitrary Angle Pump weight (kg) ≈30