High resolution glow discharge mass spectrometer (THR-GDMS) is widely recognized as the best method for analyzing trace and ultra trace elements in solid materials. This method can quantitatively analyze more than 70 elements in samples, including lithium to uranium, matrix to ppb level impurities, etc. It is widely used in materials fields such as semiconductors, high-temperature alloys, high-purity metals, high-purity rare earths, and special coatings.