Vacuum turbo pump Impact resistant turbomolecular pump TxFB-4200 turbomolecular pump technical parameters table Model TXFB - 4200 Inlet flange 400 ISO-K Exhaust flange 100 ISO-K Pumping rate (L/S)(to air) 4200 Compression ratio N2 >10 8 H2 >6X10 2 ultimate pressure Pa is less than 2 times 10 -6 Rated speed (RPM) 15600 Imported ceramic bearings are used Vibration value (μm) ≤0.15 Startup time (min) <10 Downtime (min) <20 Recommended front stage pump (L/S) 30-70 Cooling mode Water cooling Cooling water temperature (℃) ≤20 Cooling water flow (L/min) 1 Pump body baking temperature (℃) <80 Ambient temperature (℃) 5-40 Installation direction ±5° vertical Pump weight (kg) ≈100